TOKYO — Canon said Thursday it is supplying the first unit of next-generation lithography equipment to a U.S. group that develops advanced semiconductors, introducing a new manufacturing technology that could cut costs and power usage.
The nanoimprint lithography machine is headed to the Texas Electronics Institute, a consortium supported by the University of Texas at Austin and including Intel and other chip companies, as well as public sector and academic organizations. The equipment will be used by chipmakers for research and development.